C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/00 (2006.01) C23C 16/458 (2006.01) C23F 1/02 (2006.01) H01L 21/00 (2006.01) H01L 21/683 (2006.01)
Patent
CA 2419130
A coupling ring assembly including an edge ring supported by an electrostatic edge ring chuck and a method of improving the temperature control of an edge ring in a plasma processing chamber. The edge ring can be made of a conductive material such as silicon or silicon carbide and temperature control of the edge ring can be enhanced by supplying heat transfer gas such as helium between opposed surfaces of the edge ring and the edge ring chuck.
L'invention concerne un ensemble d'anneau de couplage comprenant un anneau de bordure porté par un support de tranche d'anneau de bordure électrostatique, ainsi qu'un procédé d'amélioration de la régulation thermique d'un anneau de bordure dans une chambre de traitement au plasma. On peut élaborer l'anneau de bordure à partir d'une matière conductrice, telle que le silicium ou le carbure de silicium, et on peut améliorer la régulation thermique dudit anneau en distribuant un gaz de transfert thermique tel que l'hélium entre les surfaces opposées de l'anneau de bordure et du support de tranche dudit anneau.
Deeth Williams Wall Llp
Hubacek Jerome S.
Lam Research Corporation
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