Electrostaticcally driven vibrating beam force transducer

Details Electrostaticcally driven vibrating beam force transducer Electrostaticcally driven vibrating beam force transducer

G - Physics

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G01L 1/10 (2006.01) G01L 1/18 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 2010242

ELECTROSTATICALLY DRIVEN DUAL VIBRATING BEAM FORCE TRANSDUCER Abstract of the Disclosure A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body (12) having first and second generally parallel beams (20, 22), coupled together at their ends. First and second electrodes (14, 16) are positioned adjacent to but not in contact with the respective beams. A drive circuit (18) causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.

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