Electrothermal interface material enhancer

B - Operations – Transporting – 32 – B

Patent

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B32B 33/00 (2006.01) B82Y 30/00 (2011.01) B23K 1/005 (2006.01) B32B 18/00 (2006.01) C01B 31/00 (2006.01) F28F 3/08 (2006.01) F28F 21/02 (2006.01) G01N 29/14 (2006.01) G06F 1/20 (2006.01) H01L 23/36 (2006.01)

Patent

CA 2666815

Vertically oriented carbon nanotubes (CNT) arrays have been simultaneously synthesized at relatively low growth temperatures (i.e., < 700°C) on both sides of aluminum foil via plasma enhanced chemical vapor deposition. The resulting CNT arrays were highly dense, and the average CNT diameter in the arrays was approximately 10 nm, A CNT TIM that consist of CNT arrays directly and simultaneously synthesized on both sides of aluminum foil has been fabricated. The TIM is insertable and allows temperature sensitive and/or rough substrates to be interfaced by highly conductive and conformable CNT arrays. The use of metallic foil is economical and may prove favorable in manufacturing due to its wide use.

L'invention concerne des nanotubes de carbone (CNT) verticalement orientés, lesdits nanotubes ayant été simultanément synthétisés à des températures de croissance relativement basses (c.-à-d. < 700 °C) des deux côtés d'une plaque d'aluminium par dépôt chimique en phase vapeur favorisé par plasma. Les réseaux de CNT résultants sont très denses et le diamètre moyen des CNT dans les réseaux est d'environ 10 nm. L'invention concerne également un CNT TIM constitué de réseaux de CNT synthétisés directement et simultanément des deux côtés d'une plaque d'aluminium. Le TIM peut être inséré et permet de placer à l'interface de substrats sensibles à la température et/ou rugueux des réseaux de CNT hautement conducteurs et conformables. L'utilisation de plaques métalliques est économique et peut s'avérer favorable lors de la production en raison de son usage répandu.

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