Elevating jig for semiconductor wafers and similar articles

Details Elevating jig for semiconductor wafers and similar articles Elevating jig for semiconductor wafers and similar articles

H - Electricity

01

L

356/195

H01L 21/68 (2006.01) H01L 21/67 (2006.01)

Patent

CA 1188823

ELEVATING JIG FOR SEMICONDUCTOR WAFERS AND SIMILAR ARTICLES Abstract of the Disclosure An elevating jig, particularly suitable for elevating selected semi-conductor wafers in boat or holding member, has a base and a plurality of removable lift members which fit in apertures in the base. A locating member is provided at one end of the base for positioning a holding member on the base and the apertures in the base are at predetermined positions from the locating member. Lift members can be positioned as desired and when a holding member is placed on the jig certain wafers are lifted up, enabling easy withdrawal.

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