Ellipsometer

Details Ellipsometer Ellipsometer

G - Physics

01

J

G01J 4/04 (2006.01) G01J 4/02 (2006.01)

Patent

CA 2278981

Field of the invention Present invention relates to an ellipsometer, a device which senses the polarization state of monochromatic light. The device measures all the parameters of the polarization state of light: the degree-of-polarization, azimuth angle and ellipticity. Since there are no moving parts, the measurement is faster and it is much lower in cost. Therefore, this type of ellipsometer can be used for popular applications. Description of the prior art There are many optic solutions for sensing the polarization state of light. All of them utilize one or more polarizers , one or more waveplates and one or more photodetectors. To obtain the three parameters describing the polarization state of monochromatic light, a set of measurements has to be taken from different positions of the polarizers, waveplates or photodetectors. Therefore, data acquisition time depends on how fast the polarizers, waveplates or photodetectors are moved to their various measurement positions. In addition, the precision of positioning the polarizers, waveplates or photodetectors influences the result of the measurement. This method of obtaining the polarization state of monochromatic light limits the use to non popular applications and needs skilled personnel to handle it.

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