Ellipsometric method and apparatus

Details Ellipsometric method and apparatus Ellipsometric method and apparatus

G - Physics

01

N

73/54

G01N 21/21 (2006.01)

Patent

CA 1229499

ABSTRACT OF THE INVENTION An ellipsometric method and apparatus for studying physical properties of a testpiece provides that during the measuring operation the angular positions of a polarising means and an analysing means disposed upstream and downstream of the testpiece remain fixed. Two or more discrete, mutually different predetermined states of polarisation of the radiation employed are produced between the polarising means and the testpiece and/or between the testpiece and the analysing means, by polarisation modulating elements which are disposed in the path of the radiation. In each discrete state of polarisation, the intensity of the radiation which is polarised in the analsyer is measured and evaluated for determining the polarisation properties of the testpiece in a computer.

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