Emission spectrometer having charge coupled device detector

G - Physics – 01 – J

Patent

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G01J 3/443 (2006.01) G01J 3/28 (2006.01)

Patent

CA 2452574

An analyzer suitable for performing continuous gas analysis in ultra-high purity applications. The analyser combines a low-level emission source and a gaseous emission spectrometer (10) having a charge coupled device (CCD) diode array as a detector. The CCD detector replaces one or more photomultipliers and narrow bandpass filters typically used in spectrometers. The analyser performs various processing operations to evaluate and eliminate the effect of background light level, or dark spectrum.

L'invention concerne un analyseur destiné à réaliser une analyse de gaz en continu dans des applications de très haute pureté. L'analyseur combine une source d'émission de faible niveau et un spectromètre (10) à émission gazeuse équipé d'un réseau de diodes à dispositif de transfert de charge (CCD) servant de détecteur. Le détecteur CCD remplace un ou plusieurs photomultiplicateurs et des filtres à bande passante étroite habituellement utilisés dans les spectromètres. L'analyseur exécute diverses opérations de traitement pour évaluer et éliminer l'effet du niveau de lumière d'arrière-plan, ou les zones d'ombre.

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