Epitaxial oxide films via nitride conversion

Details Epitaxial oxide films via nitride conversion Epitaxial oxide films via nitride conversion

H - Electricity

01

L

H01L 39/00 (2006.01) B32B 15/04 (2006.01) C23C 8/02 (2006.01) C30B 23/02 (2006.01) C30B 33/00 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2425757

The present invention relates to oxide on suitable substrates, as converted from nitride precursors.

L'invention concerne des oxydes formés sur des substrats adéquats par conversion de précurseurs à base de nitrure.

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