Epitaxially grown silicon layers with relatively long...

H - Electricity – 01 – L

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356/148, 356/178

H01L 29/16 (2006.01) H01J 9/20 (2006.01) H01J 9/233 (2006.01) H01J 29/45 (2006.01) H01L 21/18 (2006.01) H01L 21/86 (2006.01) H01L 27/12 (2006.01)

Patent

CA 1010158

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