Equipment and method for supply of organic metal compound

Details Equipment and method for supply of organic metal compound Equipment and method for supply of organic metal compound

C - Chemistry, Metallurgy

23

C

32/24, 117/82

C23C 16/06 (2006.01) C23C 16/448 (2006.01)

Patent

CA 1310823

Abstract A supply equipment for stable supply of feed gas of an organic metal compound at a constant connection comprises a cylindrical vessel with an organic metal compound housed, an inlet tube of carrier gas for vaporizing said organic metal compound, an outlet tube for letting out the carrier gas substantially saturated with the vaporized organic metal compound, a room provided in the lower part of the vessel which is connected to said carrier gas inlet tube, a packed bed of an organic metal compound formed above said void part, and a partition with a plurarity of pores partitioning said room and said packed bed.

586847

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