C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
32/24, 117/82
C23C 16/06 (2006.01) C23C 16/448 (2006.01)
Patent
CA 1310823
Abstract A supply equipment for stable supply of feed gas of an organic metal compound at a constant connection comprises a cylindrical vessel with an organic metal compound housed, an inlet tube of carrier gas for vaporizing said organic metal compound, an outlet tube for letting out the carrier gas substantially saturated with the vaporized organic metal compound, a room provided in the lower part of the vessel which is connected to said carrier gas inlet tube, a packed bed of an organic metal compound formed above said void part, and a partition with a plurarity of pores partitioning said room and said packed bed.
586847
Hiai Atsuhiko
Wakimura Kazuo
Hiai Atsuhiko
Mitsui Toatsu Chemicals Inc.
Sim & Mcburney
Wakimura Kazuo
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