B - Operations – Transporting – 24 – C
Patent
B - Operations, Transporting
24
C
51/3, 316/48
B24C 1/00 (2006.01) G03F 7/26 (2006.01) H01J 9/04 (2006.01) H01J 9/14 (2006.01) H01J 9/18 (2006.01)
Patent
CA 1109677
Abstract of the Disclosure A variety of technologies have been applied in the development of a bonded grid cathode. Erosion lithography is used for making the fine-detail grid structure, combining air erosion and lithographic techniques. To obtain openings of the order of 0.001 inch (one mil) or smaller, a nozzle with a high aspect ratio exit opening is used, and the cathode grid structure is scanned. A photo resist in which the grid pattern is developed is used over the molybdenum or tungsten grid film. The metal film is removed from the grid openings by chemical etching. The photo resist over the metal grid is used as a composite mask for removing the BN insulation in the openings by erosion with Al2O3 powder from the special nozzle on the air blast gun.
336160
Allen John A.
The United States Government As Represented By The Secretary Of
LandOfFree
Erosion lithography and nozzle does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Erosion lithography and nozzle, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Erosion lithography and nozzle will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-59386