Etchant composition and use thereof

Details Etchant composition and use thereof Etchant composition and use thereof

C - Chemistry, Metallurgy

09

K

149/19

C09K 13/00 (2006.01) C09K 13/06 (2006.01) C23F 1/26 (2006.01) H01L 21/3213 (2006.01)

Patent

CA 1166130

.EN980-020 ETCHANT COMPOSITION AND USE THEREOF ABSTRACT An aqueous acidic composition suitable for etching contain- ing an acid and polyvinyl alcohol and use thereof.

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