Etching liquid for etching aluminium

Details Etching liquid for etching aluminium Etching liquid for etching aluminium

C - Chemistry, Metallurgy

09

K

149/20

C09K 13/00 (2006.01) C23F 1/36 (2006.01) H01L 21/00 (2006.01) H01L 21/3213 (2006.01)

Patent

CA 1055823

ABSTRACT: Etching liquid for selectively etching aluminium and alloys, which consists of a solution of carbonate and/or hydroxide, phosphate and ferri- cyanide. This etching liquid gives products having very good boundary resolution and little undercutting.

234469

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