Etching method employing radiation

Details Etching method employing radiation Etching method employing radiation

H - Electricity

01

L

149/5, 204/96.05

H01L 21/306 (2006.01) C01B 23/00 (2006.01) C09K 13/00 (2006.01) H01L 21/04 (2006.01) H01L 21/311 (2006.01)

Patent

CA 1124622

ABSTRACT OF THE DISCLOSURE A method for etching using radiation and a gas.

331679

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