Etching of multiple holes of uniform size

Details Etching of multiple holes of uniform size Etching of multiple holes of uniform size

C - Chemistry, Metallurgy

23

F

149/18

C23F 1/02 (2006.01) C23F 1/04 (2006.01) H01L 21/306 (2006.01)

Patent

CA 1137395

ETCHING OF MULTIPLE HOLES OF UNIFORM SIZE Abstract Uniform holes with a diameter of the order of 1 micro- meter or larger can be formed by an etching operation which employs the combined properties of the surface tension of the etch coupled with a force on the menis- cus of the etch in the hole to cause the etching to stop when one hole reaches the proper size and to permit the etching to continue on all other holes until they reach the same size. YO977-061

352847

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