F - Mech Eng,Light,Heat,Weapons – 04 – F
Patent
F - Mech Eng,Light,Heat,Weapons
04
F
230/28
F04F 1/00 (2006.01) F04B 25/02 (2006.01) F04B 37/14 (2006.01) F04B 39/04 (2006.01) F04B 41/06 (2006.01) F04D 19/04 (2006.01)
Patent
CA 2000152
An evacuation apparatus comprising (1) a reciprocating vacuum pump, the piston rings and piston shaft sealing material of which are made of a self-lubricating material at least on the surface and in which metallic bellows is or are used to seal between the piston shaft outside the cylinder and the outer face of the cylinder end wall, and (2) a turbomolecular pump in which a casing, stationary blades mounted on the casing, a rotor, and moving blades provided on the rotor are arranged coaxially, and in which the delivery opening of the reciprocating vacuum pump is open to the atmosphere and the suction opening of the turbomolecular pump is joined to an apparatus to be evacuated.
Appareil d'évacuation comprenant (1) une pompe alternative à vide dont les segments de piston et l'étanchéité des tiges de piston sont faits d'un matériau autolubrifiant au moins en surface et dans laquelle des soufflets métalliques servent à assurer l'étanchéité entre la tige du piston à l'extérieur du cylindre et la face extérieure de la paroi d'extrémité du cylindre, et (2) une pompe turbomoléculaire dans laquelle un carter, des lames stationnaires montées sur le carter, un rotor et des lames mobiles sur le rotor sont disposés coaxialement, et dans laquelle l'ouverture de refoulement de la pompe alternative à vide est ouverte à l'air libre et l'ouverture d'aspiration de la pompe turbomoléculaire est raccordée à un appareil pour évacuation.
Enomoto Tsugio
Goto Shiuichi
Okuyama Nobuhisa
Fetherstonhaugh & Co.
Mikuni Jukogyo Co. Ltd.
Toyo Engineering Corporation
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