Excitation system for a fast pulsed discharge

Details Excitation system for a fast pulsed discharge Excitation system for a fast pulsed discharge

H - Electricity

01

S

345/38

H01S 3/097 (2006.01) H01S 3/0971 (2006.01) H01S 3/0973 (2006.01)

Patent

CA 1165850

Abstract of the Disclosure: Disclosed is an excitation system for fast pulsed discharge with excitation by a highly homogeneous arc-free capacitor-discharge in a gas space between and defined by at least two electrodes of a laser chamber. The two electrodes are spaced from one another and extend parallel to the optical axis of the laser, and with first and second stripline capacitors for low- induction energy-storage and for contacting the laser electrodes and electrodes of a fast high-voltage switching gap associated therewith, respectively, in- cludes a plurality of electrodes forming part of the first and the second strip- line capacitors, a plurality of dielectric layers being disposed between the capacitor electrodes. The dielectric layers and the capacitor electrodes extend substantially normally to the optical axis of the laser and are stacked substantially parallel to the optical axis of the laser in a capacitor stack, and laterally extending connecting lugs connect the capacitor electrodes to the electrodes of the laser chamber.

358099

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