Exhaust electrode process for exhaust gas oxygen sensor

H - Electricity – 01 – M

Patent

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204/96.13

H01M 8/12 (2006.01) C03C 17/09 (2006.01) C23C 14/18 (2006.01)

Patent

CA 1124678

C-3,105 Abstract of the Disclosure: A method of sputtering a platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor. Porous high surface area platinum films are deposited that have more consistent properties. A platinum target is spaced about 3.0 - 4.5 cm from the thimble and more than 6 cm from the sputtering anode. A pressure of about 10 - 20 millitorr is used during sputtering at a DC power of about 13 - 22 watts/cm2 of target area.

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