External isolation module

Details External isolation module External isolation module

B - Operations, Transporting

05

C

32/84

B05C 15/00 (2006.01) C23C 16/54 (2006.01) F16J 15/16 (2006.01)

Patent

CA 1221827

ABSTRACT OF THE DISCLOSURE An external isolation module adapted to operatively interconnect at least one pair of plurality of adjacent vacuum chambers through which a substrate travels and into which reaction materials are introduced. The external isolation module provides a passageway for the substrate between adjacent chambers while substantially preventing the diffusion of reaction materials from one of the chambers into the adjacent chamber. An accessible, environmentally-sealed, reaction material-isolating passageway is thereby formed.

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