Fabrication methods for micromechanical elements

Details Fabrication methods for micromechanical elements Fabrication methods for micromechanical elements

C - Chemistry, Metallurgy

23

F

C23F 1/02 (2006.01) B23P 11/00 (2006.01) B23P 15/00 (2006.01) B44C 1/22 (2006.01) C03C 15/00 (2006.01) G03F 7/00 (2006.01) H01L 21/306 (2006.01)

Patent

CA 2063769

A process in which concave surfaces to form undercut edges can be made and the application of such process to making micromechanical devices. Concave surfaces forming undercut edges are are made in a wall of a stationary structure extending from a planar surface by growing a convex bumper into the wall. The bumper forms a convexo-concave relationship with the wall. The bumper is then removed from the wall in such a manner as to preserve the concave, undercut surface of the wail. The stationary structure and the planar surface is then further processed by coating with a sacrificial layer, and a structural layer. The structural layer is patterned into a movable structure that is held onto the stationary structure by the curved, undercut edge such as the slot in a slider. Final processing includes removing the sacrificial layer to free the movable structure from the stationary structure.

Affiliated with

Also associated with

Rating

Fabrication methods for micromechanical elements does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication methods for micromechanical elements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication methods for micromechanical elements will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1677969