Fabrication of long-range periodic nanostructures in glass

Details Fabrication of long-range periodic nanostructures in glass Fabrication of long-range periodic nanostructures in glass

B - Operations, Transporting

82

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B82B 1/00 (2006.01) B82B 3/00 (2006.01) G02B 5/18 (2006.01)

Patent

CA 2503309

To make high quality long-range periodic nanostructures in a transparent or semi- transparent substrate, the transparent or semi-transparent substrate is scanned with a linearly polarized laser beam generated by a femtosecond laser and exceeding a predetermined energy/pulse threshold along a scanning path. Sub-diffraction limit structures are formed as periodic planes of modified material in the transparent or semi- transparent substrate extending along the scanning path. The modified material can then be chemically etched to form cavities.

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