Fabrication of patterned lines of high t -superconductors

Details Fabrication of patterned lines of high t -superconductors Fabrication of patterned lines of high t -superconductors

H - Electricity

01

L

356/112, 356/184

H01L 39/24 (2006.01) H01L 21/027 (2006.01)

Patent

CA 1335438

A method for producing a patterned layer of high Tc oxide superconductor is provided in which patterning is accomplished prior to the attainment of a superconducting state in the layer. A solution containing precursor com- ponents of the desired oxide superconductor is sprayed onto a substrate and dried to pro- vide a layer thereon. This layer is then irradiated in selected areas to convert the irradiated layers to an intermediate oxide state, the nonirradiated areas being un- changed. The nonirradiated areas are then dissolved away, leaving a pattern of oxide material. This oxide material is then con- verted to a high Tc superconducting state, as by annealing in an oxygen atmosphere. This provides the patterned layer of high Tc oxide superconductor. An example of such a super- conductor is a mixed copper oxide, such as Y1Ba2Cu3O7-x.

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