Fabrication of quantum well polarization independent active...

H - Electricity – 01 – L

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H01L 31/02 (2006.01) G02F 1/017 (2006.01) H01L 21/62 (2006.01) H01L 31/0232 (2006.01) H01S 5/50 (2006.01) H01S 5/34 (2006.01)

Patent

CA 2240940

An active semiconductor device that performs in a substantially polarization independent manner. A quantum well waveguide is intermixed by intermixing atoms across an interface between well and barrier layers. The atoms include at least 2 groups wherein intermixing of one group is at a substantially greater rate than another group. Cations are interdiffused at a greater rate than said anions across interfaces between well and barrier layers. The intermixing must be sufficient to provide strain within layers of the waveguide and sufficent to at least partially degenerate light hole and heavy hole bands of the structure. Preferably intermixing is sufficient to completely degenerate light hole and heavy hole bands to essentially produce a device that is completely polarization independent.

L'invention concerne un dispositif semi-conducteur actif qui fonctionne d'une manière sensiblement indépendante de la polarisation. Un guide d'ondes avec des puits quantiques subit une interdiffusion par le passage d'atomes par les interfaces entre les couches de puits et les couches barrières. Les atomes comprennent au moins deux groupes, et la diffusion d'un groupe est sensiblement plus rapide que celle de l'autre groupe. Les cations subissent une interdiffusion à une vitesse supérieure à celle des anions par les interfaces entre les couches de puits et les couches barrières. L'interdiffusion doit être suffisante pour introduire une contrainte dans les couches du guide d'ondes et pour provoquer la dégénérescence au moins partielle des bandes de trous légers et des bandes de trous lourds de la structure. De préférence, la diffusion doit être suffisante pour provoquer la dégénérescence complète des bandes de trous légers et des bandes de trous lourds, pour obtenir un dispositif qui soit complètement indépendant de la polarisation.

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