B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
356/153
B05D 3/06 (2006.01) C23C 16/48 (2006.01) H01L 21/285 (2006.01) H01L 21/3205 (2006.01)
Patent
CA 1270070
Abstract: This invention relates to a method of fabricating semiconductor devices, which includes growing patterned metal layers. Patterned metal growth is obtained on a substrate by illuminating the substrate in the presence of a metal containing molecule adsorbed on the substrate. After initial illumination, the photoreacted molecules catalyze further metal growth without further illumination.
534963
American Telephone And Telegraph Company
Kirby Eades Gale Baker
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