Fabrication of silicon solar cell with anti-reflective film

H - Electricity – 01 – L

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H01L 31/0224 (2006.01) C23F 1/00 (2006.01) H01L 21/00 (2006.01) H01L 23/485 (2006.01) H01L 31/0216 (2006.01)

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CA 1030380

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