Fabrication of thermal detecting structures

H - Electricity – 01 – L

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H01L 27/146 (2006.01) G01J 5/22 (2006.01)

Patent

CA 2540941

Methods for use in fabricating thermal detecting structures include altering contact regions thereof (i.e., exposed surfaces of thermal detecting material) for use in the formation of electrical connection to conductive contacts thereof. For example, the thermal detecting material may be vanadium oxide and the alteration may be performed by back sputtering the contact region using inert gas ions. The formation of the electrical connection to the conductive contacts includes providing conductive material in contact with at least the altered contact regions.

L'invention concerne des procédés de fabrication de structures de détection thermique. Ces procédés consistent à modifier des zones de contact sur lesdites structures (les surfaces exposées du matériau de détection thermique, par exemple), de sorte à établir une connexion électrique avec des contacts conducteurs. Le matériau de détection thermique peut être de l'oxyde de vanadium, et les modifications peuvent être réalisées par pulvérisation arrière d'ions de gaz inerte sur la zone de contact. L'établissement de la connexion électrique avec les contacts conducteurs consiste à mettre un matériau conducteur en contact avec les zones de contact modifiées au moins.

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