Fabry-perot interferometer

Details Fabry-perot interferometer Fabry-perot interferometer

G - Physics

01

J

325/1, 363/2, 34

G01J 3/26 (2006.01) G02B 6/38 (2006.01) G02B 26/02 (2006.01) G02B 26/04 (2006.01) G02B 26/08 (2006.01) G02F 1/21 (2006.01) H01S 3/10 (2006.01)

Patent

CA 1333452

A Fabry-Perot interferometer comprises a single crystal silicon substrate (1) with an integrally formed diaphragm (6) supported between walls (2-5). A glass superstrate (14) is mounted adjacent the substrate (1) with a spacer (13) sandwiched therebetween. Facing surfaces (12,16) of the diaphragm (6) and superstrate (14) are polished and suitably coated to define reflective surfaces and the position of the diaphragm may be altered to vary the response of the interferometer.

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