Fabry-perot optical sensor and method of manufacturing the same

G - Physics – 01 – D

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G01D 5/26 (2006.01) G01H 9/00 (2006.01) G01L 1/04 (2006.01) G01L 1/24 (2006.01) G01L 7/08 (2006.01) G01L 11/02 (2006.01) G01P 15/00 (2006.01)

Patent

CA 2599696

A Fabry-Perot optical sensor for sensing a parameter such as pressure or the like is provided. The sensor includes a lead optical fiber from the end of which projects a spacer having an end surface curving inwardly. A diaphragm extends across the forward end of the spacer. The diaphragm is flexible in response to the parameter to be measured and defines a forward reflector of the Fabry-Perot cavity within the optical sensor. A method for manufacturing such a sensor is also provided.

L~invention concerne un capteur optique de Fabry-Pérot servant à détecter un paramètre tel que la pression. Le capteur comporte une fibre optique principale à l~extrémité de laquelle se prolonge un écarteur présentant une surface d~extrémité incurvée vers l~intérieur. Une membrane se prolonge en travers de l~extrémité avant de l~écarteur. La membrane fléchit en fonction du paramètre à mesurer et définit un réflecteur avant de la cavité de Fabry-Pérot à l~intérieur du capteur optique. L~invention concerne également un procédé de fabrication d~un tel capteur.

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