Fast microbolometer pixels with integrated micro-optical...

G - Physics – 01 – J

Patent

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G01J 5/08 (2006.01) G01J 5/20 (2006.01)

Patent

CA 2516049

Fast microbolometer pixels integrating micro-optical focussing elements are provided. Each microbolometer pixel includes a focussing element located between the pixel body and a substrate, this focussing element preferably sending radiation back towards the central portion of the microbolometer. There is also provided a microbolometer array having a plurality of such microbolometer pixels. Advantageously, to increase the pixel speed, the present microbolometers may be built smaller than the detector and no additional structures need to be attached to said detector.

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