Feature forming process using plasma treatment

Details Feature forming process using plasma treatment Feature forming process using plasma treatment

B - Operations, Transporting

22

F

B22F 3/105 (2006.01) B22F 1/00 (2006.01) C22F 1/14 (2006.01) H01L 21/288 (2006.01) C09C 1/00 (2006.01)

Patent

CA 2694775

A process comprising: (a) forming a feature comprising uncoalesced silver- containing nanoparticles; (b) heating the uncoalesced silver-containing nanoparticles to form coalesced silver-containing nanoparticles; and (c) subjecting to a plasma treatment the uncoalesced silver-containing nanoparticles or the coalesced silver-containing nanoparticles, or both the uncoalesced silver-containing nanoparticles and the coalesced silver-containing nanoparticles, wherein the feature prior to the action (c) exhibits a low electrical conductivity but the electrical conductivity of the feature subsequent to the actions (b) and (c) is increased by at least about 100 times, wherein the action (c) is undertaken during one or more of prior to the heating, or during the heating, or after the heating.

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