Ferroelectric electron beam source and method for generating...

H - Electricity – 01 – J

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H01J 29/46 (2006.01) H01J 31/10 (2006.01)

Patent

CA 2507454

A comb-shaped electrode is formed on the main surface of a ferroelectric thin film and a planer electrode is formed on the rear surface of a ferroelectric thin film. Then, the property of the main surface of the ferroelectric thin film is converted into semi-conduction. Then, the assembly comprised of the ferroelectric thin film, the comb-shaped electrode and the planer electrode is disposed in a given atmosphere. Under the circumstance, a negative voltage is applied to the comb-shaped electrode to polarize the ferroelectric thin film, and a negative impulse voltage is applied to the planer electrode, thereby generating electron beams from the main surface of the ferroelectric thin film.

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