Ferroelectric thin film travelling wave rotation sensor

Details Ferroelectric thin film travelling wave rotation sensor Ferroelectric thin film travelling wave rotation sensor

G - Physics

01

C

G01C 19/58 (2006.01) G01C 19/56 (2006.01) G01P 13/00 (2006.01)

Patent

CA 2145543

A diaphragm (24) is disposed over a cavity (18) formed in a silicon base (14). A plurality of electrodes (22) are radially dis- posed about the diaphragm overlying the cavity, and a signal applying circuit (34) applies a signal to the plurality of electrodes so that portions of the diaphragm flex for establishing a net angular momentum (e.g., the flexing of the diaphragm simulates a tra- veling wave encircling the cavity). A deformation sensing circuit comprising a plurality of strain gages (42) interconnected to form a corresponding plurality of Wheatstone bridges (38) are disposed about the periphery of the cavity along orthogonal axes (X, Y) for sensing deformation of the structure about the orthogonal axes.

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