Field effect transistor with a short channel lenght

H - Electricity – 01 – L

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356/149

H01L 21/28 (2006.01) H01L 27/04 (2006.01) H01L 29/10 (2006.01) H01L 29/78 (2006.01)

Patent

CA 1153831

ABSTRACT Disclosed is a field effect transistor with a short effective channel length which can be realized with greater certainty than in known field effect transistors with two gate electrodes. Undesirable capacitances in the transistor can be made small. The transistor comprises a semi- conductor body with source and drain regions and first and second gates which each cover a part of the body between the source and drain regions. The gates are insulated from the body. The first gate is on the source side and extends in the source-drain direction a distance corresponding to the effective channel length of the transistor. The second gate is parti- ally above the first gate and insulated from it. A region of the body between the source and drain which is not covered by the first gate is doped oppositely to the rest of the body.

352698

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