Field-emission scanning auger electron microscope

Details Field-emission scanning auger electron microscope Field-emission scanning auger electron microscope

H - Electricity

01

J

358/10

H01J 37/256 (2006.01) G01N 23/227 (2006.01) H01J 37/073 (2006.01)

Patent

CA 1236592

A B S T R A C T Field-Emission Scanning Auger Electron Microscope The Auger electron microscope is equipped with a field-emission tip (10) maintained at an essentially constant distance above the surface of the specimen (7). The tip (10) may consist of a tungsten (100) whisker having a radius of ~50 nm at the apex, the working distance being on the order of 1mm. Auger electrons emitted from the surface of the specimen (7) are collect- ed by an electron energy analyzer (11) for conventional processing. Mutual scanning displacement between tip (10) and specimen (7) is obtained by an xyz-drive module (6) which is also responsible for adjusting the working distance of the tip (10). The entire microscope set-up is mounted on vibration damping means (4, 5) and may be inserted into a vacuum system by means of an appropriate flange (1), if need be.

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