Film forming apparatus and film forming method

H - Electricity – 01 – B

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H01B 13/00 (2006.01) C03C 17/25 (2006.01) C23C 18/02 (2006.01)

Patent

CA 2621434

A film forming apparatus comprising means (A) for forming of liquid microparticles with diameters regulated; means (B) consisting of a space for guiding the formed liquid microparticles under temperature control; means (C) for spraying of the guided liquid microparticles; and means (D) consisting of a space for application of the sprayed liquid microparticles to a treatment object to thereby provide a transparent conductive film.

La présente invention concerne un appareil de formation de film qui comprend : des moyens (A) permettant de former des microparticules liquides possédant un diamètre régulé ; des moyens (B) composés d~un espace permettant de guider les microparticules de liquides obtenues à température contrôlée ; des moyens (C) permettant de pulvériser les microparticules de liquide guidées ; et des moyens (D) composés d~un espace servant à appliquer les microparticules liquides pulvérisées sur un objet de traitement afin d~obtenir ainsi un film conducteur transparent.

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