G - Physics – 03 – F
Patent
G - Physics
03
F
18/1032, 400/770
G03F 7/004 (2006.01) C08J 3/09 (2006.01) C08L 33/24 (2006.01) G03F 7/039 (2006.01) G03F 7/16 (2006.01)
Patent
CA 1290087
FILM-FORMING COMPOSITIONS COMPRISING POLYGLUTAIMIDE ABSTRACT OF THE DISCLOSURE This invention relates to a composition of matter useful for applying polyglutarimide-comprised films to a surface, and to a method of determining what the composition of matter should be to obtain a particular applied dry film thickness, wherein the dry film has a uniform thickness profile. In particular, the present invention enables the spin-casting of films comprised of polyglutarimide to film thicknesses greater than 1 micrometer. Films of thicknesses greater than 1 micrometer have particular use in the microelectronics industry, for applications such as planarizing underlayers, metal lift off layers, and as part of multilayer resist structures where it is desired to obtain a high aspect ratio for the resist structure.
507288
Brunsvold William R.
Crockatt Dale M.
Skinner Michael Patrick
International Business Machines Corporation
Saunders Raymond H.
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