Filters employing both acidic polymers and...

Details Filters employing both acidic polymers and... Filters employing both acidic polymers and...

B - Operations, Transporting

01

D

B01D 53/04 (2006.01)

Patent

CA 2406703

A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to absorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

L'invention concerne un filtre qui comprend au moins deux milieux d'adsorption différents. Premier lieu, le milieu de chimiosorption, poreux et renfermant un groupe fonctionnel acide, sert à évacuer les bases moléculaires, dont l'ammoniac, les amines organiques, les imides et les amino-alcools, de l'atmosphère servant dans la fabrication de semi-conducteurs et dans d'autres processus qui requièrent des environnements gazeux non contaminés et de haute qualité. En second lieu, le milieu de physisorption peut adsorber des contaminants condensables, en particulier ceux dont le point d'ébullition dépasse 150 ·C. Il peut également contenir du charbon actif non traité.

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