B - Operations – Transporting – 01 – D
Patent
B - Operations, Transporting
01
D
B01D 53/02 (2006.01) B01D 53/04 (2006.01) B01J 20/26 (2006.01) B01J 20/28 (2006.01)
Patent
CA 2341184
A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite that has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, imides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
L'invention concerne une matière filtrante propre, à efficacité élevée et à faible perte de charge. Cette matière est poreuse et qui comprend un groupe fonctionnel acide. Le filtre peut comporter, par exemple, un composite de filtre non tissé qui est constitué de perles de copolymère de styrène et de divinylbenzène sulfoné et poreux comprenant des groupes latéraux fonctionnels d'acide sulfonique. Le filtre non tissé sert à éliminer les bases moléculaires, dont l'ammoniac, les amines organiques, les imides, les amino-alcools, les alcoolamines se trouvant dans l'atmosphère et utilisés dans la fabrication de semi-conducteurs et dans d'autres procédés qui nécessitent des environnements gazeux non contaminés et de haute qualité.
Kinkead Devon
Kishkovich Oleg
Rezuke Robert W.
Borden Ladner Gervais Llp
Entegris Inc.
Extraction Systems Inc.
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