Fine-line solid state device

Details Fine-line solid state device Fine-line solid state device

H - Electricity

01

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356/134

H01L 21/441 (2006.01) H01L 21/3205 (2006.01) H01L 21/768 (2006.01) H01L 23/532 (2006.01)

Patent

CA 1149082

Sheng-3-13 - 9 - FINE-LINE SOLID STATE DEVICE Abstract of the Disclosure Aluminum electrically conducting patterns for integrated circuits are achieved with narrow lines and unexpectedly-high electromigration characteristics by making the crystal grains of the pattern into a chain- shaped structure with {111} orientation. A process for achieving the structure is also described.

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