Fine surface observing apparatus

Details Fine surface observing apparatus Fine surface observing apparatus

G - Physics

01

Q

G01Q 60/18 (2010.01) G12B 21/06 (2006.01)

Patent

CA 2101386

ABSTRACT OF THE DISCLOSURE An optical scan type tunnel microscope based on a new principle, having higher resolution, is provided. The apparatus of the invention is comprised of at least an optical fiber 3 whose head portion is covered by an energy acceptor 6, a prism on which a sample which contains an energy donator 7 or is covered by the energy donator 7 is placed, a XY-axis transfer mechanism 9, XY-axis control mechanism 10, Z-axis transfer mechanism 11, Z-axis control mechanism 12, light source 13, optical system 14, and optical detecting system 15, and high resolution surface observation may be carried out by utilizing a phenomenon that a distance dependency of energy transfer efficiency from the energy donator excited by light to the energy acceptor is caused neighboring region as compare to intensity distribution of evanescent light. - 1 7 -

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