Flat panel imaging device with ground plane electrode

H - Electricity – 01 – L

Patent

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Details

H01L 27/148 (2006.01) H01L 27/146 (2006.01)

Patent

CA 2184428

A flat panel radiation imaging device that exhibits reduced capacitive coupling between pixel photodiodes and readout data lines, and thus in operation has reduced phantom images and image artifacts, includes a ground plane electrode that is disposed between the substrate and the plurality of pixels arranged in an imaging array pattern. The ground plane electrode is a conductive material layer that is disposed in a continuous sheet underlying the imaging array pattern; altematively, the ground plane is a patterned sheet of conductive material having data line cutout areas disposed so that no ground plane conductive material underlies or is closer than a lateral set off distance from data lines in the imaging array pattern. A patterned ground plane further may include pixel electrode cutout sections disposed such that ground plane conductive material underlies pixel electrodes in the imaging array pattern only by a selected overlap distance around the boundaries of the pixel electrode.

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