Flatness monitor

Details Flatness monitor Flatness monitor

G - Physics

01

B

G01B 11/30 (2006.01) G01N 21/88 (2006.01) G01N 21/89 (2006.01)

Patent

CA 2573077

A system method of monitoring flatness of a material. A beam of coherent light is projected on to a surface of the material to provide a line on the surface. An image of the line on the surface is obtained, and the image is used to determine a deviation of the line from a predetermined configuration. The deviation corresponds to an irregular pattern or unevenness of the material.

L'invention concerne un système et un procédé de contrôle de la planéité d'un matériau. Un faisceau de lumière cohérente est projeté sur la surface du matériau afin qu'une ligne soit formée sur ladite surface. Une image de la ligne sur la surface est obtenue et l'image est utilisée pour déterminer une déviation de la ligne par rapport à une configuration prédéterminée. La déviation correspond à un motif irrégulier ou à une irrégularité du matériau.

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