Flow control apparatus for a semiconductor manufacturing wet...

Details Flow control apparatus for a semiconductor manufacturing wet... Flow control apparatus for a semiconductor manufacturing wet...

B - Operations, Transporting

08

B

B08B 15/00 (2006.01) H01L 21/00 (2006.01) H01L 21/02 (2006.01)

Patent

CA 2290922

Apparatus for controlling the volume of air that is supplied and exhausted from a electronic semiconductor manufacturing wet bench is disclosed. The volume of air that is exhausted from the wet bench is increased during predetermined portions of the manufacturing process and is reduced during noncritical times as a function of predetermined conditions that may be detected or otherwise determined during the manufacturing process.

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