Flow sensor

Details Flow sensor Flow sensor

G - Physics

01

F

73/69, 356/99

G01F 1/56 (2006.01)

Patent

CA 1220359

ABSTRACT A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. A base supports the sensors and heater out of contact with the base with the sensors disposed on opposite sides of the heater. Also disclosed is a semiconductor device comprising a thin film member which comprises an electri- cal element. The device further comprises a semiconduc- tor body supporting the thin film member out of contact with the body and apparatus for electrically pulsing the electrical element. Such devices are the basis for many types of apparatus, including flow sensors.

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