Fluid control apparatus

Details Fluid control apparatus Fluid control apparatus

F - Mech Eng,Light,Heat,Weapons

15

B

F15B 13/00 (2006.01) F15B 13/08 (2006.01) G05D 7/00 (2006.01) G05D 16/00 (2006.01)

Patent

CA 2180204

A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on- off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.

Affiliated with

Also associated with

Rating

Fluid control apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fluid control apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fluid control apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1712983