Fluid control apparatus

Details Fluid control apparatus Fluid control apparatus

G - Physics

05

D

G05D 7/00 (2006.01) F16K 27/00 (2006.01)

Patent

CA 2249925

A fluid control apparatus comprising a plurality of fluid control members (7), (8), (9), (10) arranged at an upper level and a plurality of couplings (11), (12), (13), (14), (15) arranged at a lower level. The second fluid control member (8) from left comprises a pressure regulator (19) and a pressure sensor (20) which are integrally provided on a blocklike body (18) mounted on the coupling (12) so as to be removable upward. The third fluid control member (9) from left comprises on-off valves (23), (24) integrally provided on a blocklike body (22) which is mounted on the couplings (13), (14) so as to be removable upward.

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