Fluid-encapsulated mems optical switch

G - Physics – 02 – B

Patent

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Details

G02B 26/08 (2006.01) B81B 5/00 (2006.01) G02B 6/35 (2006.01) G02B 26/02 (2006.01)

Patent

CA 2346451

A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors (22) situated in trenches located at waveguide cross-points (29). The trenches are filled with collimation-maintaining fluid (30) and the mirrors (22) are immersed therein. The collimation maintaining fluid (30) prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors (22) and prevents some of the typical MEMS mirror (22) problems found in the related art. In particular, the MEMS mirrors (22) disclosed in the present invention is reduced to approximately 15 wide and 2 thick, resulting in shorter actuation distances to approximately 15. This feature results in an optical switch having faster switching times.

L'invention porte sur un commutateur optique MEMS dans lequel un fluide est encapsulé et qui comprend une matrice de guides d'ondes optiques pourvue de miroirs (22) MEMS placés dans des tranchées ménagées au niveau de points de contact (22) du guide d'onde. Les tranchées sont remplies d'un fluide (30) maintenant la collimation et dans lequel sont immergés les miroirs (22). Le fluide (30) maintenant la collimation empêche le faisceau lumineux de s'étaler lorsqu'il pénètre dans les points de contact du commutateur. Ce dispositif permet d'utiliser des miroirs MEMS beaucoup plus petits et d'éviter certains problèmes liés à l'utilisation de ces miroirs (22) et qui ont été observés dans la technique antérieure. Notamment, les miroirs (22) MEMS de cette invention ont une largeur réduite approximativement à 15 microns et une épaisseur à 2 microns, ce qui d'obtenir des distances de commande plus courtes allant jusqu'à approximativement 15 microns et de produire un commutateur optique à temps de commutation plus rapides.

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