G - Physics – 01 – F
Patent
G - Physics
01
F
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G01F 1/68 (2006.01) G01F 1/684 (2006.01) G01N 27/18 (2006.01) G01N 30/02 (2006.01)
Patent
CA 1314413
ABSTRACT OF THE DISCLOSURE A thermal effect sensing device comprises a semiconductor substrate supporting an insulating layer which has a thin film of platinum deposited on it. Holes are etched through the semiconductor substrate and the insulating layer. The platinum film is shaped to provide a serpentine resistive element suspended over one of the holes . The serpentine element is suspended from the rim of the hole, but is otherwise unsupported. The resistive element has a low thermal mass and there is a low thermal resistance between the element and fluid in the sensor. The sensor senses thermal properties of the fluid in the sensor, such as mass flow or thermal conductivity. A second conductive film is insulatingly deposited on the first film to provide a resistive sensor electrically isolated from a resistive heating element .
580021
Crabtree James H.
Sittler Fred C.
Marks & Clerk
Rosemount Inc.
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