Fluid jet seed particle generator for silane pyrolysis reactor

Details Fluid jet seed particle generator for silane pyrolysis reactor Fluid jet seed particle generator for silane pyrolysis reactor

C - Chemistry, Metallurgy

01

B

23/326

C01B 33/02 (2006.01) C01B 33/029 (2006.01) C23C 16/442 (2006.01)

Patent

CA 1194275

-1- FLUID JET SEED PARTICLE GENERATOR FOR SILANE PYROLYSIS REACTOR ABSTRACT OF THE INVENTION Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane by means of a jet of gas which causes relatively larger particles of product silicon to impinge upon each other and become comminuted to a fine size and be transported upwardly into a fluidized bed as seed particles.

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