Fluid treatment apparatus and method

Details Fluid treatment apparatus and method Fluid treatment apparatus and method

H - Electricity

05

K

H05K 3/00 (2006.01) B05C 5/02 (2006.01) B05D 1/36 (2006.01) B08B 3/02 (2006.01) C23F 1/08 (2006.01) F26B 21/00 (2006.01) H05K 3/22 (2006.01)

Patent

CA 2091909

A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

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